한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Deposition and Luminescent Characterization of $Y_3Al_5O_{12}$:Ce Thin Film Phosphor

  • Kim, Joo-Won (Dept. of Materials Science and Engineering, Kyonggi University) ;
  • Han, Sang-Hyuk (Dept. of Materials Science and Engineering, Kyonggi University) ;
  • Kim, Young-Jin (Dept. of Materials Science and Engineering, Kyonggi University) ;
  • Chung, Sung-Mook (Organic EL Devices Team, ETRI)
  • Published : 2004.08.23
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Abstract

Trivalent cerium ($Ce^{3+}$) activated yttrium aluminum garnet ($Y_3Al_5O_{12}$, YAG) phosphor thin films were deposited on quartz glass substrates by rf magnetron sputtering. The effects of sputtering parameters and annealing condition on the luminescent properties were investigated. The sputtering parameters were $O_2$/Ar gas ratio, rf power, and deposition time. The films were annealed at 1200 $^{\circ}C$ for 5 hours in $N_2+$vacuum atmosphere. Polycrystalline YAG:Ce thin film phosphor could be obtained with a gas ratio of $O_2$/(Ar+$O_2$)=0.5 after post-annealing. PL spectra excited at 450 nm showed a yellow single band at 550 nm.

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