NOVEL SURFACE PROFILER SYTSTEM FOR INSPECTION OF FLAT PANEL DISPLAY

  • Kimura, Munehiro (Department of Electrical Engineering, Faculty of Engineering, Nagaoka University of Technology) ;
  • Akahane, Tadashi (Department of Electrical Engineering, Faculty of Engineering, Nagaoka University of Technology) ;
  • Iwata, Tetsuya (Core System Co. Ltd.)
  • Published : 2004.08.23

Abstract

Novel surface profiler system for inspection of the display components is demonstrated In the case of the liquid crystal display, for example, not only the flatness of the alignment film but also the quality of rubbing can be inspected. Furthermore, the shape of the component such as the color filter, electrode and mirror can be inspected without removing each component.

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