한국정보디스플레이학회:학술대회논문집
- 2004.08a
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- Pages.44-47
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- 2004
Ultra Thin Film Barrier Layer for Plastic OLED
- Kopark, Sang-Hee (Basic Research Laboratory Electronics and Telecommunications Research Institute) ;
- Oh, Ji-Young (Basic Research Laboratory Electronics and Telecommunications Research Institute) ;
- Hwang, Chi-Sun (Basic Research Laboratory Electronics and Telecommunications Research Institute) ;
- Yang, Yong-Suk (Basic Research Laboratory Electronics and Telecommunications Research Institute) ;
- Chu, Hye-Yong (Basic Research Laboratory Electronics and Telecommunications Research Institute)
- Published : 2004.08.23
Abstract
Fabrication of barrier layer on PES substrate and plastic OLED device by atomic layer deposition are carried out. Simultaneous deposition of 30nm of
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