한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Ultra Thin Film Barrier Layer for Plastic OLED

  • Kopark, Sang-Hee (Basic Research Laboratory Electronics and Telecommunications Research Institute) ;
  • Oh, Ji-Young (Basic Research Laboratory Electronics and Telecommunications Research Institute) ;
  • Hwang, Chi-Sun (Basic Research Laboratory Electronics and Telecommunications Research Institute) ;
  • Yang, Yong-Suk (Basic Research Laboratory Electronics and Telecommunications Research Institute) ;
  • Chu, Hye-Yong (Basic Research Laboratory Electronics and Telecommunications Research Institute)
  • Published : 2004.08.23
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Abstract

Fabrication of barrier layer on PES substrate and plastic OLED device by atomic layer deposition are carried out. Simultaneous deposition of 30nm of $AlO_x$ film on both sides of PES gives film MOCON value of 0.0615g/$m^2$.day (@38$^{\circ}C$, 100% R.H). Introduction of conformal $AlO_x$ film by ALD resulted in enhanced barrier properties for inorganic double layered film including PECVO $SiN_x$. Preliminary life time to 91% of initial luminance (1300 cd/$m^2$ ) for 100nm of PECVD $SiN_x$/30nm of ALD $AlO_x$ coated plastic OLED device was 260 hours.

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