Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)
- 2004.11a
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- Pages.301-305
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- 2004
Effects of plasma Immersion ion Implanted and deposited layer on Adhesion Strength of DLC film
- Yi Jin-Woo (Graduate School of Mechanical Engineering., Kyungpook National University) ;
- Kim Jong-KuK (Surface Engineering Department, Korea Institute of Machinery and Materials) ;
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Kim Seock-Sam
(School of Mechanical Engineering, Kyungpook National University)
- Published : 2004.11.01
Abstract
Effects of ion implantation on the adhesion strength of DLC film as a function of ion doses and implanted energies were investigated. Ti ions were implanted on the Si-wafer substrates followed by DLC coating using ion beam deposition method. Adhesion strength of DLC films were determined by scratch adhesion tester. Morphologies and compositional variations at the different ion energies and doses were observer by Laser Microscope and Auger Electron Spectroscopy, respectively. From results of scratch test, the adhesion strength of films was improved as increasing ion implanted energy, however there was no significant evidence with ion dose.
Keywords
- Adhes ion Strength;
- Diamond-like Carbon(DLC);
- Plasma Immersion ion Implantation and Deposition(PIIID);
- Scratch Test