Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)
- 2004.11a
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- Pages.90-98
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- 2004
Nano/Micro-friction properties or Chemical Vapor Deposited (CVD) Self-assembled monolayers on Si-wafer
- Yoon Eui-Sung (Tribology Research Center, Korea Institute of science and Technology) ;
- Singh R.Arvind (Tribology Research Center, Korea Institute of science and Technology) ;
- Han Hung-Gu (Tribology Research Center, Korea Institute of science and Technology) ;
- Kong Hosung (Tribology Research Center, Korea Institute of science and Technology)
- Published : 2004.11.01
Abstract
Nano/micro-scale studies on friction properties were conducted on Si (100) and three self-assembled monolayers (SAMs) (PFOTC, DMDM, DPDM) coated on Si-wafer by chemical vapor deposition technique. Experiments were conducted at ambient temperature