Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2004.10a
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- Pages.83.1-83.1
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- 2004
Thermal Annealing Effects on the Structural and Electrical Properties of Aluminum Titanate Films Grown by Atomic Layer Deposition Method
ALD로 증착한 Aluminum Titanate 박막의 열처리 온도에 따른 박막 특성 분석
Abstract
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