Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2004.10a
- /
- Pages.81.4-81.4
- /
- 2004
Atomic Layer Deposition of $Bi_2Ti_2O_7$ Thin Films for Capacitor Dielectric Applications
- Hwang Gyu Weon (School of Materials Sciences and Engineering, Seoul National University) ;
- Kim Wan Don (School of Materials Sciences and Engineering, Seoul National University) ;
- Hwang Cheol Seong (School of Materials Sciences and Engineering, Seoul National University) ;
- Min Yo-Sep (Materials & Devices Lab, Samsung Advanced Institute of Technology) ;
- Cho Young Jin (Materials & Devices Lab, Samsung Advanced Institute of Technology) ;
- Han Jeong-Hee (Materials & Devices Lab, Samsung Advanced Institute of Technology)
- Published : 2004.10.01
Abstract
Keywords