Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2004.08c
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- Pages.872-875
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- 2004
Thermal Response Analysis of a Low Thermal Drift Three-axis Accelerometer for High Temperature Environments
- Ishida Makoto (Department of Electrical and Electronic Engineering) ;
- Lee Kyung Il (Venture Business Laboratory, Toyohashi University of Technology) ;
- Takao Hidekuni (Department of Electrical and Electronic Engineering) ;
- Sawada Kazuaki (Department of Electrical and Electronic Engineering) ;
- Seo Hee Don (Department of Electrical and Electronic Engineering, Yeungnam University)
- Published : 2004.08.01
Abstract
In this paper, thermal response analysis of a temperature controlled three-axis accelerometer for high temperature environments with integrated micro-heaters and temperature sensors is investigated with finite element method (FEM) program, ANSYS and infrared thermal measurement systems. And availability to application fields from a viewpoint about short thermal response time is discussed. In this paper, the time of three-axis accelerometer for high temperatures becoming