한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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- Pages.1179-1182
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- 2004
다항근사 및 2항근사 볼츠만 방정식을 이용한 $CF_4+Ar$ 혼합기체의 전자이동속도 연구
The study of electron drift velocity in $CF_4+Ar$ molecular gas mixture by 2-term and multi-term approximation of the Boltzmann equation
- Song, Byoung-Doo (Dongguk Univ.) ;
- Ha, Sung-Chul (Dongguk Univ.) ;
- Jeon, Byoung-Hoon (Joongbu Univ.)
- 발행 : 2004.07.05
초록
This paper describes the information for quantitative simulation of weakly ionized plasma. In previous paper, we calculated the electron transport coefficients in
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