Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07b
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- Pages.1179-1182
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- 2004
The study of electron drift velocity in $CF_4+Ar$ molecular gas mixture by 2-term and multi-term approximation of the Boltzmann equation
다항근사 및 2항근사 볼츠만 방정식을 이용한 $CF_4+Ar$ 혼합기체의 전자이동속도 연구
- Song, Byoung-Doo (Dongguk Univ.) ;
- Ha, Sung-Chul (Dongguk Univ.) ;
- Jeon, Byoung-Hoon (Joongbu Univ.)
- Published : 2004.07.05
Abstract
This paper describes the information for quantitative simulation of weakly ionized plasma. In previous paper, we calculated the electron transport coefficients in
Keywords
- The two-term approximation of the Boltzmann equation;
- The multi-term approximation of the Boltzmann equation;
- E/N;
- W;
- Ar;
- $CF_4$