한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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- Pages.998-1001
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- 2004
Combinatorial 방법으로 증착한 Zn-Sn-O계 박막의 열처리 효과
Annealing effect of Zn-Sn-O films deposited using combinatorial method
- 고지훈 (고려대학교 신소재공학과) ;
- 김인호 (한국과학기술연구원 박막재료연구센터) ;
- 김동환 (고려대학교 신소재공학과) ;
- 이경석 (한국과학기술연구원 박막재료연구센터) ;
- 박종극 (한국과학기술연구원 박막재료연구센터) ;
- 이택성 (한국과학기술연구원 박막재료연구센터) ;
- 백영준 (미래기술연구부) ;
- 정병기 (한국과학기술연구원 박막재료연구센터) ;
- 김원목 (한국과학기술연구원 박막재료연구센터)
- Ko, Ji-Hoon (Dept. of Advanced Materials Engineering, Korea University) ;
- Kim, In-Ho (Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
- Kim, Dong-Hwan (Dept. of Advanced Materials Engineering, Korea University) ;
- Lee, Kyeong-Seok (Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
- Park, Jong-Keuk (Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
- Lee, Taek-Sung (Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
- Baik, Young-Jun (Future Technology Research Center, Korea Institute of Science and Technology) ;
- Cheong, Byung-Ki (Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
- Kim, Won-Mok (Thin Film Materials Research Center, Korea Institute of Science and Technology)
- 발행 : 2004.07.05
초록
ZnO,