Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07b
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- Pages.998-1001
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- 2004
Annealing effect of Zn-Sn-O films deposited using combinatorial method
Combinatorial 방법으로 증착한 Zn-Sn-O계 박막의 열처리 효과
- Ko, Ji-Hoon (Dept. of Advanced Materials Engineering, Korea University) ;
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Kim, In-Ho
(Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
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Kim, Dong-Hwan
(Dept. of Advanced Materials Engineering, Korea University) ;
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Lee, Kyeong-Seok
(Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
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Park, Jong-Keuk
(Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
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Lee, Taek-Sung
(Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
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Baik, Young-Jun
(Future Technology Research Center, Korea Institute of Science and Technology) ;
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Cheong, Byung-Ki
(Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
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Kim, Won-Mok
(Thin Film Materials Research Center, Korea Institute of Science and Technology)
- 고지훈 (고려대학교 신소재공학과) ;
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김인호
(한국과학기술연구원 박막재료연구센터) ;
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김동환
(고려대학교 신소재공학과) ;
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이경석
(한국과학기술연구원 박막재료연구센터) ;
-
박종극
(한국과학기술연구원 박막재료연구센터) ;
-
이택성
(한국과학기술연구원 박막재료연구센터) ;
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백영준
(미래기술연구부) ;
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정병기
(한국과학기술연구원 박막재료연구센터) ;
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김원목
(한국과학기술연구원 박막재료연구센터)
- Published : 2004.07.05
Abstract
ZnO,