한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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- Pages.985-988
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- 2004
빛에 의한 Cz 실리콘 기판의 carrier lifetime 감소에 대한 연구
Investigation of the Carrier Lifetime of Cz-Si after Light Induced Degradation
- Lee, Ji-Youn (Photovoltaics R&D Center, Sungjin Semitech Co.) ;
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Lee, Soo-Hong
(Strategic Research Energy Center, Dept. of Electronics Engineering, Sejong University)
- 발행 : 2004.07.05
초록
The carrier lifetime of boron doped Cz silicon samples after light induced degradation could be improved by optimized rapid thermal processing (RTP). The important five different parameters varied in order to investigate which parameter is important for the stable lifetime after light induced degradation,