한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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- Pages.965-968
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- 2004
$SiN_x/Si$ 기판에 제조된 후막 PZT의 횡 압전 계수 $(e_{31,f})$ 측정
Measurement of Effective Transverse Piezoelectric Coefficients $(e_{31,f})$ of Fabricated Thick PZT Films on $SiN_x/Si$ Substrates
- Jeon, Chang-Seong (KETI) ;
- Park, Joon-Shik (KETI) ;
- Lee, Sang-Yeol (Yonsei Uni.) ;
- Kang, Sung-Goon (Hanyang Uni.) ;
- Lee, Nak-Kyu (KITECH) ;
- Ha, Kyoang-Hwan (KITECH)
- 발행 : 2004.07.05
초록
Effective transverse Piezoelectric Coefficients
키워드