Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07b
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- Pages.932-934
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- 2004
Fabrication of the SAW filter Using a FeSiB films
FeSiB 박막을 이용한 SAW 필터의 제작
- Park, K.Y. (Dong-A Univ) ;
- Son, J.Ch. (KIST) ;
- Shin, K.H. (Kyung-Sung Univ) ;
- Lim, S.H. (KIST) ;
- SaGong, Geon (Dong-A Univ)
- Published : 2004.07.05
Abstract
Due to the increasing variety and capacity of information and communication media, systems of microwave band communication have branched out extensively. Surface acoustic wave (SAW) devices fabricated FeSiB thin films on quartz substrate were deposited by RF magnetron sputter and by photolithographic processes. This device is with a center frequency 146MHz and the insertion loss as low as -43dB was obtained.
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