Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07b
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- Pages.834-837
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- 2004
Etching characteristics of BST thin films for microwave application
초고주파 응용을 위한 BST 박막의 식각 특성
- Kim, Gwan-Ha (Chung-Ang University) ;
- Kim, Chang-Il (Chung-Ang University)
- Published : 2004.07.05
Abstract
BST thin films were etched with inductively coupled