한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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- Pages.748-752
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- 2004
멤브레인 구조를 위한 DLC 박막의 특성에 관한 연구
A study of properties of DLC films for membrane structure
- Lee, Tae-Yong (Sungkyunkwan Univ.) ;
- Kim, Eung-Kwon (Sungkyunkwan Univ.) ;
-
Park, Yong-Seob
(Sungkyunkwan Univ.)
;
-
Hong, Byung-You
(Sungkyunkwan Univ.)
;
- Song, Joon-Tae (Sungkyunkwan Univ.) ;
-
Park, Young
(Korea Railroad Research Instituce)
- 발행 : 2004.07.05
초록
The Hydrogenated amorphous carbon (a-C:H) thin films are deposited to fabricate suppored layer on silicon substrate with a closed field unbalanced magnetron(CFUBM) sputtering system. This study focuses on the characteristic of Diamond like carbon (DLC) films and Pb(Zr,Ti)