한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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- Pages.726-729
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- 2004
Tunable 소자 응용을 위한 PST 박막의 식각특성
Etching characteristics of PST thin films for tunable device application
- Kim, Jong-Shik (Chung Ang University) ;
- Kim, Chang-Il (Chung Ang University)
- 발행 : 2004.07.05
초록
Etching characteristics of (Pb,Sr)