Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07b
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- Pages.667-670
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- 2004
Dielectric Properties of PZT(4060/6040) Multilayered Thin Films with Substrate Temperature
기판온도에 따른 PZT(4060)/(6040) 다층 박막의 유전 특성
- Han, Sang-Wook (Kwangwoon University) ;
- Lee, Sang-Hyun (Sunmoon University) ;
- Lee, Sung-Gab (Seonam University) ;
- Bae, Seon-Gi (Incheon University) ;
- Lee, Young-Hie (Kwangwoon University)
- Published : 2004.07.05
Abstract
The dielectric properties of PZT(4060)/(6040) multilayered thin films with substrate temperature were investigated. PZT(4060)/(6040) thin films were deposited by RF sputtering method on Pt/Ti/