Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on design of the Ferroelectrics Cantilever for RF Switch

RF Switch용 강유전체 Cantilever 설계에 관한 연구

  • Kim, In-Sung (Korea Electrotechnology Research Institute) ;
  • Min, Bok-Ki (Korea Electrotechnology Research Institute) ;
  • Song, Jae-Sung (Korea Electrotechnology Research Institute) ;
  • Muller, A. (IMT Romania)
  • 김인성 (한국전기연구원 전자기소자연구그룹) ;
  • 민복기 (한국전기연구원 전자기소자연구그룹) ;
  • 송재성 (한국전기연구원 전자기소자연구그룹) ;
  • Published : 2004.07.05
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Abstract

RF MEMS is a miniature device or an array of integration devices and mechanical components and fabricated with If batch-processing techniques. RF MEMS application area are in phased arrays and reconfigurable apertures for defence and telecommunication systems, switching network for satellite communication, and single-pole double throw switches for wireless application. Recently, RF MEMS switches have been developed for the application to the milimeter wave system. RF MEMS switches offer a substantilly higher performance than PM diode or FET switches. In this paper, SPDT(single-pole-double-throw) switch are designed to use 10 GHz. Actuation voltage and displacement are simulated by tool. And stress and distribution are simulated.

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