Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.11a
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- Pages.628-631
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- 2004
The study of ionization and attachment coefficients in $CF_4$ molecular gas by Boltzmann equation
볼츠만 방정식에 의한 $CF_4$ 분자가스의 전리 및 부착계수에 관한 연구
- Song, Byoung-Doo (Dongguk Univ.) ;
- Ha, Sung-Chul (Dongguk Univ.) ;
- Jeon, Byoung-Hoon (Joongbu Univ.)
- Published : 2004.11.11
Abstract
A tetrafluoromethane
Keywords
- $CF_4$;
- Ar;
- ionization coefficient;
- attachment coefficient;
- effective ionization coefficient;
- BEq(Boltzmann Equation)