Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.11a
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- Pages.187-190
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- 2004
Etching characteristics of PST thin films using quderupole mass spectrometry
QMS를 이용한 PST 박막의 식각 특성
- Kim, Jong-Sik (ChungAng Uni.) ;
- Kim, Gwan-Ha (ChungAng Uni.) ;
- Kim, Kyoung-Tae (ChungAng Uni.) ;
- Kim, Dong-Pyo (KDG Eng.) ;
- Kim, Chang-Il (ChungAng Uni.)
- Published : 2004.11.11
Abstract
In this study, PST thin films were etched with inductively coupled