한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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- Pages.328-331
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- 2004
Hot filament 화학기상증착법을 이용한 질산화철 촉매농도에 따른 탄소나노튜브의 성장 특성
Characteristics of carbon Nanotubes grown by Hot Filament Plasma Enhanced Chemical Vapor Deposition method with iron(III) nitrate metal oxide concentration
- Jung, Kyung-Ho (School of information and communication Engineering, Sungkyunkwan University) ;
- Cho, Won-Seok (Center for Advanced plasma Surface Technology, Sungkyunkwan University) ;
- Kim, Hyung-Jin (Center for Advanced plasma Surface Technology, Sungkyunkwan University) ;
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Hong, Byung-You
(Center for Advanced plasma Surface Technology, Sungkyunkwan University)
- 발행 : 2004.07.05
초록
Hot filament 플라즈마 화학기상 증착법(HFPECVD)를 사용하여 질산화철의 농도에 따른 탄소나노튜브의 성장 특성을 관찰하기 위해 실험을 진행하였다. 암모니아(