한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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- Pages.169-172
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- 2004
RTP Furnace에서 공정과정이 태양전지에 미치는 영향
Influence of the Optimized Process in Rapid Thermal Processing on Solar Cells
- Lee, Ji-Youn (Photovoltaic R&D Center, Sungjin Semitech Co.) ;
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Lee, Soo-Hong
(Strategic Research Energy Center, Dept. of Electronics Engineering, Sejong University)
- 발행 : 2004.07.05
초록
The effect of the process parameters on the stable lifetime in rapid thermal firing(RTF) was investigated in order to optimize the process for the Cz-silicon. The process temperature was varied between