한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
- /
- Pages.130-133
- /
- 2004
집적회로 응용을 위한 빗살형 캐패시터의 특성연구
Characterization of Interdigitated Capacitors for Integrated Circuit Application
- Kim, Kil-Han (Department of Electrical and Electronic Engineering Yonsei University) ;
-
Lee, Kyu-Bok
(Korean Electronics Technology Institute) ;
-
Kim, Jong-Kyu
(Korean Electronics Technology Institute) ;
-
Yun, Il-Gu
(Department of Electrical and Electronic Engineering Yonsei University)
- 발행 : 2004.07.05
초록
The characterization of interdigitated capacitors was investigated. The test structures are manufactured by low temperature co-fired ceramic(LTCC) process and their s-parameters were measured. The optimized equivalent circuit models for test structures were obtained using the partial element equivalent circuit(PEEC) method. Predictive modeling was performed on different test structures using optimized parameters to verify the circuit models. From this result, the manufacturability on the process can be improved through the predictive modeling for the characteristics of interdigitated capacitors.