Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference (한국조명전기설비학회:학술대회논문집)
- 2004.11a
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- Pages.9-12
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- 2004
Inductively Coupled Plasma discharge characteristic of Ne, Ar, Kr mixed gas
Ne, Ar, Kr 혼합가스에서의 유도결합형 플라즈마 방전특성
- Her, In-Sung (Ehime Univ.) ;
- Choi, Yong-Sung (Ehime Univ.) ;
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Lee, Chong-Chan
(Ehime Univ.) ;
- Jeong, Young-Il (Electric Tech Inc.) ;
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Park, Dae-Hee
(Wonkwang Univ.)
- Published : 2004.11.03
Abstract
Recently, the environmental problem has received considerable attention. so, many lamps have been developing for environmental requirement and energy efficiency. also, at glow discharge lamp researchers try to reduce energy spending that is power saving lamp. this kind requirement agree with strong points of electrodeless fluorescent lamp has received to now lighting sauce. At low pressure as mTorr I.C.P make high density plasma easily, is good to maintain discharge, has high ionization and does not have failing lighting and losing ability of electron radiation by oxidation and volatilization of electrodes, because this tape does not have electrodes This point of I.C.P can use at electrodeless fluorescent lamp in this study ICP display elements and Ar, Ne, Kr are researched for optical characteristic. each gas is looked into optical characteristic, also mixed gases is experiment for optical characteristic.
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