Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2004.11a
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- Pages.187-190
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- 2004
Dry etching of BST thin films using inductively coupled plasma
유도결합플라즈마를 이용한 BST 박막의 건식 식각 특성
- Kim, Gwan-Ha (ChungAng University) ;
- Kim, Kyoung-Tae (ChungAng University) ;
- Kim, Chang-Il (ChungAng University) ;
- Kim, Dong-Pyo (KDG Engineering) ;
- Lee, Cheol-In (AnSan College of Technology) ;
- Kim, Tae-Hyung (YeoJoo Technical College)
- Published : 2004.11.05
Abstract
In this work, we investigated etching characteristics and mechanism of BST thin films using
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