한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2004년도 추계학술대회 논문집
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- Pages.1109-1112
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- 2004
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- 2005-8446(pISSN)
미세 가공력 검출기구를 이용한 나노패터닝
Nanopatterning using Machining Force Sensing Module
초록
This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80