Analysis of Flatness of a Two-Axis Linear Motor with Grey Theory

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As the demands of X-Y linear motors increase, it becomes very important to measure flatness errors and to compensate them. In this study, in order to investigate flatness errors, a laser interferometer is used for measurement. To improve the measurement efficiency, a Union Jack method is adopted instead of a square method. The square method is frequently used because of its accuracy, but it requires many measurement points. In this study, the Union Jack method with Grey Theory is used. By using the Grey Theory, unmeasured data are predicted, and these are compared with results of the square method. The results show that the Union Jack method with Grey Theory is accurate enough to replace the square method.