Abstract
Magnetostrictive actuators have seen increasing use in fine positioning system because it has many advantages such as friction free, resolution of ${\mu}{\textrm}{m}$ or nm scale, and powerful output force. Usually, the magnetic circuit of magnetostrictive actuator has components which are flux return path, coil, and magnetostrictive material. It is classified in two types according to existence of the permanent magnet. The magnetic circuit having optimal performances transfer magnetic field which is obtained by providing input current at coil without energy loss. This paper described mathematical model of magnetic circuit for getting design variables. The modeling equation is obtained from the relations between flux and reluctance of the magnetic equivalent circuit. Also, finite element analysis has been used to study the performance of magnetic circuit according to change of design variables such as existence and shape of the permanent magnet, flux return path etc. The modification of dimensions enables us to optimize magnetic circuit.
