Microvalve with multilayer Bender Type PZT Actuator

적층 벤더형 압전 액추에이터 마이크로 밸브

This study deals with the microvalve, which is composed of the multilayer bender type PZT actuator, actuator controller and microvalve body. The object of this study is to develope the microvalve with multilayer bender type PZT actuator. In order to achieve this object, prototype PZT actuator and microvalve were suggested and manufactured. Also, the performance of this model was evaluated through the experiments.