한국방사성폐기물학회:학술대회논문집 (Proceedings of the Korean Radioactive Waste Society Conference)
- 한국방사성폐기물학회 2004년도 학술논문집
- /
- Pages.32-42
- /
- 2004
Removal of Metallic Cobalt Layers by Reactive Cold Plasma
-
Kim, Yong-Soo
(Hanyang University) ;
- Jeon, Sang-Hwan (Hanyang University) ;
- Yim, Byung-Joo (Hanyang University) ;
- Lee, Hyo-Cheol (Hanyang University) ;
- Jung, Jong-Heon (Korea Atomic Energy Research Institut) ;
-
Kim, Kye-Nam
(Korea Atomic Energy Research Institute)
- 발행 : 2004.06.01
초록
Recently, plasma surface-cleaning or surface-etching techniques have been focused in respect of the decontamination of spent or used nuclear parts and equipment. In this study the removal rate of metallic cobalt surface is experimentally investigated via its surface etching rate with a