한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)
- 한국공작기계학회 2004년도 춘계학술대회 논문집
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- Pages.453-458
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- 2004
초정밀 스테이지용 변위 센서
A Gap Sensor Design for Precision Stage
초록
A capacitate sensor is a proper device for measuring high small displacement. General design parameters and procedure are discussed and a test sensor was built to have a measuring range of 100