한국지능시스템학회:학술대회논문집 (Proceedings of the Korean Institute of Intelligent Systems Conference)
- 한국퍼지및지능시스템학회 2004년도 춘계학술대회 학술발표 논문집 제14권 제1호
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- Pages.149-152
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- 2004
차세대 반도체 세정장비용 스마트 제어기 설계
Design of Smart Controller for New Generation Semiconductor Wet Station
Abstract
Generally the wafer is increased by 300mm. We are desired that the wafer is prevented from pollutions of metal contaminant on surface of wafer. We have to develop new wafer cleaning process of IC Manufacturing that can reduce DI water and chemical by removal of the wafer cleaning process step. Moreover, it is difficult to control temprature and density of chemical in spite of rapidly increasing automation of system. We design smart module controller for new generation of semiconductor wet station with intelligent algorithm using data that is taken by computer simulation for optimal system.