Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Cage Link and the Effect of Cross-Link Breakdown

Cross-Link Breakdown 효과와 Cage Link

  • Oh, Teresa (Research Institute of Advanced Technology, Faculty of Electrical and Electronic Eng., Cheju National University) ;
  • Kim, Kyung-Sik (Research Institute of Advanced Technology, Faculty of Electrical and Electronic Eng., Cheju National University)
  • 오데레사 (제주대학교 첨단기술연구소, 전기전자공학부) ;
  • 김경식 (제주대학교 첨단기술연구소, 전기전자공학부)
  • Published : 2004.06.01
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Abstract

Organosilicate films are promising porous low-dielectric materials, which can replace the silicon dioxide films. It was researched that organosilicate films have two different chemical shifts according to the increase of the flow rate ratio. There are the red shift due to the electron deficient substitution group, and the blue shift of the electron rich substitution group. Among these chemical shifts, the blue shift from $1000 cm^{-1}$ to $1250 cm^{-1}$ was related with the formation of pores. The methyl radicals of the electron-rich substitution group terminate easily the Si-O-Si cross-link, and the Si-O-C cage-link near $1057 cm^{-1}$ is originated from the cross-link breakdown due to much methyl radicals.

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