대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2004년도 하계종합학술대회 논문집(2)
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- Pages.363-366
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- 2004
2단계 스퍼터링에 의한 PZT 박막의 유전특성
Dielectric properties of PZT thin films by 2 step sputtering
- Park Sam-Gyu (Dept. of Electronic Engineering, Honam University) ;
- Mah Jae-Pyung (Dept. of Electronic Engineering, Honam University)
- 발행 : 2004.06.01
초록
PZT thin films were formed by rf-magnetron sputtering on
키워드