표면 미세 가공 기술로 제작된 Piezoresistive Microcantilever를 이용한 바이오 센서의 제작 및 특성

Fabrication of Piezoresistive Microcantilever using Surface Micromachining Technique for Biosensors

A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. To evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well carried out the measurement of deflection.