Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2004.07c
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- Pages.2090-2092
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- 2004
A Study on the Measurement Methodology of Characteristics of the Vibratory Micro Gyroscope Using the Quality factor and the Resonant Displacement
Quality factor 와 공진시 변위 측정을 이용한 진동형 자이로스코프의 특성 평가에 관한 연구
- Jeon, Seung-Hoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Lee, June-Young (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Jung, Hyoung-Kyoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Chang, Hyun-Kee (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
- 전승훈 (서울대학교 전기컴퓨터공학부) ;
- 이준영 (서울대학교 전기컴퓨터공학부) ;
- 정형균 (서울대학교 전기컴퓨터공학부) ;
- 장현기 (서울대학교 전기컴퓨터공학부) ;
- 김용권 (서울대학교 전기컴퓨터공학부)
- Published : 2004.07.14
Abstract
In this paper, the new measurement methodology of characteristics of the vibratory micro gyroscope using Quality factor and the resonant displacement was proposed. Because the Quality factor has a large error under the high Quality factor condition, it is difficult to analyze the characteristics of the vacuum packaged vibratory micro gyroscopes with the Quality factor. We analyzed mechanical characteristics of gyroscope with the value of Quality factor. We described measurement errors of mechanical characteristics of micro gyroscopes. The measured value of Quality factor is 47532 and error range of Quality factor is from -29.8 % to 73.9 %. The value of resonant displacement is 3.4
Keywords