Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2004.07c
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- Pages.2083-2086
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- 2004
The Design of Active Controller using SMC:An application to a Micro Actuator in MEMS
슬라이딩 모드 제어기법(SMC)을 이용한 마이크로 액추에이터 (Micro Actuator)의 능동 제어기 설계
- Jee, Tae-Young (Department of Control & Instrumentation Engineering. Korea Univ.) ;
- Oh, Yong-Sul (Department of Control & Instrumentation Engineering. Korea Univ.) ;
- Cho, Byung-Sun (Department of Control & Instrumentation Engineering. Korea Univ.) ;
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Heo, Hoon
(Department of Control & Instrumentation Engineering. Korea Univ.)
- 지태영 (고려대학교 제어계측공학과 대학원) ;
- 오용설 (고려대학교 제어계측공학과 대학원) ;
- 조병선 (고려대학교 제어계측공학과 대학원) ;
-
허훈
(고려대학교 제어계측공학과 대학원)
- Published : 2004.07.14
Abstract
Variable Structure Controller with effective tracking performance is propose to control micro actuator system. Propsed VSC(Variable Structure Control) technique is implemented to tracking control of comb driving system having high non-linearity. The tracking performance due to VSC technique is compared to conventional PD(Proportional Derivative) control technique, reveals improved results.
Keywords