대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2004년도 하계학술대회 논문집 C
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- Pages.1915-1917
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- 2004
유도 결합형 플라즈마를 이용한 아르곤 가스의 휘도 특성
Luminance Properties of Argon Gas Using Inductively Coupled Plasma
- Lee, Young-Hwan (Wonkwang University) ;
- Her, In-Sung (Wonkwang University) ;
- Hwang, Myung-Keun (KILT) ;
- Choi, Yong-Sung (Wonkwang University) ;
- Park, Dae-Hee (Wonkwang University)
- 발행 : 2004.07.14
초록
Inductively coupled plasma is commonly used for electrodeless lamp due to its ease of plasma generation. Optical characteristics significantly depend on the RF power and gas pressure of the plasma. This paper describes the measurement of luminance as a function of RF power and gas pressure with a goal of finding optimal operating conditions of the electrodeless lamp. The gas pressure was varied from 10 [mTorr] to 500 [mTorr] and the RF power was varied from 10 [W] to 200 [W]. It was found that the luminance tends to be decreased when argon pressure is increased, and the luminance is increased as RF power is increased. It was also found that the luminance per unit RF power is high when the argon pressure is low and when the RF power is in the range of 30 [W]
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