대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2004년도 하계학술대회 논문집 C
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- Pages.1700-1702
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- 2004
산소첨가가 나노결정 다이아몬드 박막의 구조적 물성 및 금속과의 접합특성에 미치는 영향
Effects of oxygen additive on structural properties and metal/diamond junction characteristics of nano-crystalline diamond thin films
- 최성호 (한양대학교 전자전기제어계측공학과) ;
- 박재현 (한양대학교 전자전기제어계측공학과) ;
- 박창균 (한양대학교 전자전기제어계측공학과) ;
- 박진석 (한양대학교 전자전기제어계측공학과)
- Choi, Sung-Ho (Dept. of Electric, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Park, Jae-Hyun (Dept. of Electric, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Park, Chang-Kyun (Dept. of Electric, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Park, Jin-Seok (Dept. of Electric, Electrical, Control and Instrumentation Engineering, Hanyang University)
- 발행 : 2004.07.14
초록
Diamond films including nanocrystallites are grown by microwave plasma chemical vapor deposition using
키워드