대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2004년도 하계학술대회 논문집 C
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- Pages.1627-1630
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- 2004
PLD를 이용한 ZnO 박막의 후열처리에 관한 연구
Effects of post-annealing treatment of ZnO Thin Films by Pulsed Laser Deposition
- Kim, Jae-Hong (Department of Electrical Engineering Inha University) ;
- Lee, Cheon (Department of Electrical Engineering Inha University)
- 발행 : 2004.07.14
초록
ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266nm. Before post-annealing treatment in the oxygen ambient, the experiment of the deposition of ZnO thin films has been performed for substrate temperatures in the range of
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