대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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Pt-$SnO_2$-SiC 쇼트키 다이오드 구조를 갖는 CO 가스 감지특성에 관한 연구

A study on monoxide gas sensing characteristics of Pt-$SnO_2$-SiC Schottky diode

  • 발행 : 2004.07.14
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초록

The Pt-doped $SnO_2$ thin film for CO sensor applications obtained by RF sputtering from a target of the same compound in an Ar-$O_2$ atmosphere. Pt-SnO2-SiC Schottky diode detection of CO gas Cause the remarkable change in electrical resistivity of the semiconductor. the good gas sensitivity is shown when annealing condition is 600$^{\circ}C$, 1hr in RTP and detected temperature is 350$^{\circ}C$.

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