대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2004년도 하계학술대회 논문집 D
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- Pages.2495-2497
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- 2004
초정밀 스테이지용 능동 진동제어시스템 설계
Active Vibration Control System Design for Nano-scale Stage
초록
A system, featuring the hybrid isolator for control in the vertical direction, of active microvibration control was proposed. The main components of this system are a stage vibration isolation table with built-in acceleration sensors for detecting microvibration, hybrid isolators and a digital controller with high precision signal converters. The vibration control algorithm is focused on settling-time critical application and feedback/feedforward combination.
키워드