Nanotopography Impact and Planarization Efficiency of Ceria Slurry for STI-CMP
Ceria 슬러리를 이용한 STI CMP의 나노토포그래피의 영향과 평탄화 효과
- PARK Jin-Hyung (Nano-SOI Process Laboratory, Hanyang University) ;
- KATOH Takeo (Nano-SOI Process Laboratory, Hanyang University) ;
- KANG Hyun-Goo (Nano-SOI Process Laboratory, Hanyang University) ;
- PAIK Ungyu (Department of Ceramic Engineering, Hanyang University) ;
- PARK Jea-Gun (Nano-SOI Process Laboratory, Hanyang University)
- Published : 2004.04.01
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