Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2003.10a
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- Pages.40.1-40
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- 2003
Effect of $O_2$ Partial Pressure on Properties of Transparent $AlO_x$ Thin Films Deposited by Reactive Ion Beam Sputtering
- Seong, J.W. (R & D Center, P & I Corp, Shinnae Techotown) ;
- Yoon, K.H. (Department of Ceramic Engineering, Yonsei University) ;
- Kim, K.H. (R & D Center, P & I Corp, Shinnae Techotown) ;
- Koh, S.K. (R & D Center, P & I Corp, Shinnae Techotown)
- Published : 2003.10.17
Abstract
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