Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2003.04a
- /
- Pages.231.2-231
- /
- 2003
Effect of Reaction Gas on the Structural and Optical Features of nc-Si:H thin Films Prepared by PECVD Techniques
PECVD 기법에의해 제조된 나노 결정 Si 박막의 구조 및 광학적 특성
Abstract
Keywords