Influence of Substrate Bias Voltage on Deposition Behavior and Microhardness of Ti-Si-N Coating Layers by Hybrid Coating System of Arc Ion Plating and Sputtering Techniques

Choi, Sung-Ryong (School of Materials Science and Engineering, Pusan National University) ;
Park, In-Wook (School of Materials Science and Engineering, Pusan National University) ;
Park, Jong-Hyun (School of Materials Science and Engineering, Pusan National University) ;
Kim, Kwang-Ho (School of Materials Science and Engineering, Pusan National University)