Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2003.04a
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- Pages.29.2-29
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- 2003
The Effect of Physical Characteristics of Cerium Oxide on Nanotopography of Chemical Mechanical Polishing for Shallow Trench Isolation
나노 세리아 입자의 특성이 CMP 나노포토그래피에 미치는 영향
Abstract
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